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Product Details:
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| Application: | Semiconductor (IC), Implant System | Material: | 99.8% Al2O3 |
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| Color: | White | Size: | Customized |
| Shape: | Round, Balls, Irregular, Tube, Customized | Density: | >=3.9g / Cm3 |
| Feature: | High Purity Alumina, High Electrical Insulation, Low Dielectric Loss | Product Name: | Alumina Domes, Alumina Rings |
99.8% High Purity Alumina Ceramic Arm For Wafer Drive Of Semiconductor
ZG Ceramic produced Ceramic arm for wafer drive of semiconductor feature good structural strength, high temperature resistance, high pressure resistance, good accuracy, good parallelism, high density and uniform organization. For many years, it has been used by the semiconductor manufacturing plant.
ZG Ceramic boasts a group of excellent engineers and enjoys a unique high-profile technology in the special-shaped ceramic processing projects. Special-shaped processing technology is the strengths of ZG Ceramics.
Fields Served:
Specification:
| 特性项目 Items | 三氧化二铝 Al2O3 | ||||||||
| 材质编号 Material No. |
A99 | A997 | A997LT | A998 | A999 | ||||
| 颜色 Color | 白 White | 象牙色 Ivory | 象牙色 Ivory | 象牙色 Ivory | 象牙色 Ivory | ||||
| 纯度 Purity (Wt%) | ≥99% | ≥99.7% | ≥99.7% | ≥99.8% | ≥99.9% | ||||
| 密度 Density |
g/cc | ASTM-C20 | 3.8 | 3.92 | 3.92 | 3.93 | 3.94 | ||
| 吸水率 Water Absorption |
% | ASTM-C373 | 0 | 0 | 0 | 0 | 0 | ||
| HV硬度 HV Hardness |
GPa | ASTM C1327-03 | 15 | 17 | 16 | 18 | 18 | ||
| 抗弯强度 Flexural Strength |
MPa | ASTM C1161-02 | 365 | 370 | 390 | 400 | 400 | ||
| 抗压强度 Compressive Strength |
MPa | ASTM C773 | 2450 | 2500 | 2500 | 2500 | 2600 | ||
| 弹性衡量 Elastic Modulus |
GPa | ASTM C1198-01 | 360 | 375 | 385 | 385 | 385 | ||
| 波松比 Poisson's Ratio |
- | ASTM C1198-01 | 0.23 | 0.23 | 0.23 | 0.23 | 0.23 | ||
| 断裂韧性 Fracture Toughness |
Mpa*m1/2 | ASTM C1421-01 | 3 | 4 | 4 | 4 | 4 | ||
| 膨胀系数 Thermal Expansion R.T |
×10-6/℃ R.T 400 ℃ |
ASTM C372-94 | 7.2 | 8.2 | 8.2 | 8.2 | 8.2 | ||
| 热传导率 Thermal Conductivity |
W/(M.K) | ASTM C408-88 | 29 | 32 | 32 | 32 | 33 | ||
| 耐热冲击 Thermal Shock Resistance |
℃ | - | 200 | 200 | 200 | 200 | 200 | ||
| 介电强度 Dielectric Strength |
KV/mm | ASTM D149-97 | 15 | 15 | 15 | 16 | 18 | ||
| 体积电阻率 Volume Resistivity |
Ω.cm×1014 | ASTM D257-99 (20°C) |
1 | 1 | 1 | 1 | 1 | ||
| 介电常数 Dielectric Constant |
- | ASTM D150-98 (1 MHz) |
9.9 | 9.9 | 9.9 | 9.9 | 9.7 | ||
| 介电损耗 Dielectric Loss tangent |
(×10-4) | ASTM D150-98 (1 MHz) |
20 | 10 | <2 | 10 | 5 | ||
| 硝酸(60%), 90°C HNO3 |
WT loss mg/cm2/D | - | 0.1 | <0.05 | <0.05 | <0.05 | <0.03 | ||
| 硫酸(95%), 95°C H2SO4 |
WT loss mg/cm2/D | - | 0.33 | <0.23 | <0.23 | <0.23 | <0.2 | ||
| 氢氧化钠(30%), 80°C NaOH |
WT loss mg/cm2/D | - | 0.26 | <0.04 | <0.04 | <0.04 | <0.02 | ||
Contact Person: Daniel
Tel: 18003718225
