High Durability Industrial Ceramic Aluminum Nitride

Industrial Ceramic Aluminum Nitride

The process equipment involved in the pumping and transport systems for liquid and gaseous media contains a significant number of shut-off and control valves. Elements of valves and fittings directly overlapping the flow are subject to a destructive effect of the flow, in the case of abrasive particles, corrosive media, high temperatures and cavitation leads to a drastic reduction in the resource and the need for frequent replacement of reinforcing units. The use of high-strength ceramic materials, resistant to corrosion and wear, allows increasing the life of equipment many times.

Manufacturing Processes:

Main aoolications:

• Components for semiconductor equipment

1. Plates, Wafer, Rings, Gas distribution plates, Nozzles
2. Top nozzles or Baffles, Pedestal heaters, Cover plates
3. RF windows, Crucibles

• Substrate
• Heat resistant base materials

Key Features & Specifications:

• Utilizes hot pressing technology
• Up to diameter of 650mm
• Very low porosity
• High themal conductivity
• Ultra chemical resistant
• Direct sintered to allow for net shape sintering

Quality Control: