High Flexibility Yttrium Oxide Thermal Shock Resistance Ceramic Parts

High Flexibility Yttrium Oxide Thermal Shock Resistance

Unlike traditional ceramics that tend to be hard and brittle, Zirconia offers high strength, wear resistance, and flexibility far beyond those of most other technical ceramics. Zirconia is a very strong technical ceramic with excellent properties in hardness, fracture toughness, and corrosion resistance; all without the most common property of ceramics – high brittleness.

Materials Properties:

Manufacturing Processes:

Quality Conturol:

Main application:

• Component for semiconductor equipment

1. RF window or Lid
2. Focus rings
3. Nozzles
4. Gas distribution plates