High Quality E-Chuck Resistance Corrosion Sic Heating Elements

High quality E-Chuck resistance corrosion

Custimize dielectric layers materials

Less than 0.1 seconds of clamping and de-clamping time

Microstructure(dimple)sizes:300microns diameter minimum

Typical global flatness:0.5-3mircon PV(D=300mm)

Standard clamping voltage 1-3kv (possible >15kv)

Microstructures (dimple)reduce contact area by a factor of100(1% contact area)

Capabilities of exceratec

ESC design according to customer's requirements

Manufacture new ESC totally new ESC manufacturing

Refurbish at level 1,2 and 3.