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Product Details:
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Highlight: | aluminum nitride heater ceramic,industrial aluminum nitride heater,aluminum nitride heating element |
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New Product Of Aluminum Nitride Heater
HEATER SIZE : 200MM/300MM
NUMBER OF HEATING CONTROLLED ZONE:
SINGLE ZONE HEATER/ DUAL ZONE HEATER
ESC FUNCTION: ESC MONOPOLAR ESC/BIPOLAR ESC
HEATERTEMPERATURE: ≥450℃/≥550℃/≥650℃
TEM PERATARE UNIFORMITY: ±1%-1.5%
SHAFT LEAK RATE AT BONDING PORTION: <5E-9PA M3/S (AT RT)
HEATING RATE: HEATING AND COOLING PROCESS<5℃/MIN
Quality Control:
Contact Person: Daniel
Tel: 18003718225
Fax: 86-0371-6572-0196